JPS6322576B2 - - Google Patents

Info

Publication number
JPS6322576B2
JPS6322576B2 JP59092992A JP9299284A JPS6322576B2 JP S6322576 B2 JPS6322576 B2 JP S6322576B2 JP 59092992 A JP59092992 A JP 59092992A JP 9299284 A JP9299284 A JP 9299284A JP S6322576 B2 JPS6322576 B2 JP S6322576B2
Authority
JP
Japan
Prior art keywords
nitrocellulose
polymer
layer
refractive index
outermost
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59092992A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60237450A (ja
Inventor
Yasunori Fukumitsu
Mitsuo Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd filed Critical Asahi Chemical Industry Co Ltd
Priority to JP59092992A priority Critical patent/JPS60237450A/ja
Publication of JPS60237450A publication Critical patent/JPS60237450A/ja
Publication of JPS6322576B2 publication Critical patent/JPS6322576B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Laminated Bodies (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP59092992A 1984-05-11 1984-05-11 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法 Granted JPS60237450A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59092992A JPS60237450A (ja) 1984-05-11 1984-05-11 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59092992A JPS60237450A (ja) 1984-05-11 1984-05-11 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法

Publications (2)

Publication Number Publication Date
JPS60237450A JPS60237450A (ja) 1985-11-26
JPS6322576B2 true JPS6322576B2 (en]) 1988-05-12

Family

ID=14069859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59092992A Granted JPS60237450A (ja) 1984-05-11 1984-05-11 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法

Country Status (1)

Country Link
JP (1) JPS60237450A (en])

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4759990A (en) * 1985-11-27 1988-07-26 Yen Yung Tsai Composite optical element including anti-reflective coating
JPH0529473Y2 (en]) * 1986-03-14 1993-07-28
JPH0529474Y2 (en]) * 1986-03-14 1993-07-28
JPH0644148B2 (ja) * 1986-06-25 1994-06-08 ダイセル化学工業株式会社 反射防止コ−テツドペリクルの製法
JP2535971B2 (ja) * 1987-11-05 1996-09-18 三井石油化学工業株式会社 ペリクル
JP2733483B2 (ja) * 1988-12-13 1998-03-30 三井化学株式会社 高光線透過性防塵体の製造方法
CA2005096C (en) * 1988-12-13 1999-03-23 Tokinori Agou High light-transmissive dust-proof body and method of preparing same
US5061024C1 (en) * 1989-09-06 2002-02-26 Dupont Photomasks Inc Amorphous fluoropolymer pellicle films
US6926952B1 (en) 1998-01-13 2005-08-09 3M Innovative Properties Company Anti-reflective polymer constructions and method for producing same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846301A (ja) * 1981-09-14 1983-03-17 Toray Ind Inc 反射防止膜を有する透明材料

Also Published As

Publication number Publication date
JPS60237450A (ja) 1985-11-26

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